RF MEMS Circuit Elements and Models. RF/Microwave Substrate Properties. Micromachined-Enhanced Elements. Capacitors. Inductors. Varactors. MEM Switches. Shunt MEM Switch. Low-Voltage Hinged MEM Switch Approaches. Push-Pull Series Switch. Folded-Beam-Springs Suspension Series Switch. Resonators. Transmission Line Planar Resonators. Cavity Resonators. Micromechanical Resonators. Film Bulk Acoustic Wave Resonators. MEMS Modeling. MEMS Mechanical Modeling. MEMS Electromagnetic Modeling
